• Quad arm vacuum robot (4 E/E) for twin process modules

• Link typed Structure
  • High heat-resistance
  • UHV Available
  • Long-life operation

• AWC function

• Branching arm structure

• Link typed Structure
  • Minimization of turning radius of double hands with maximum reach.

• High throughput for single process module

• Minimized foot print by 5 axes L-motion vacuum robot

• Real time monitoring

• AWC function

• Three FOUPs without tracks
• Horizontal changer mechanism for short wafer swap time
• Mapping sensor available as an option
• The modular design of RT unit and elevation unit - Easy maintenance
• Prepared a new line up for 450mm wafer transfer with improved arm rigidity

• High precision robot by TAZMO’s robot production technology
• Space-saving ATM robot with long time operation
• Supply to Samsung Electronics and SK Hynix
• Self diagnostics through real time monitoring
• Minimum tack time by moving route optimization