VTM Robot
日本TAZMO社の国内代理店で国内顧客と協業でRobot開発協議,営業/CS等を進める
Features
- Quad arm vacuum robot (4 E/E) for twin process modules
- Link typed Structure
- High heat-resistance
-
- UHV Available
-
- Long-life operation
-
Features
- Link typed Structure
- Minimization of turning radius of double hands with maximum reach.
- High throughput for single process module
- Minimized foot print by 5 axes L-motion vacuum robot
Model S0086
Features
- Quad arm vacuum robot (4 E/E) for twin process modules
- Link typed Structure
- High heat-resistance
-
- UHV Available
-
- Long-life operation
-