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PRODUCT

Products

Transfer Robot

VTM Robot

Robot business cooperation, development, sales and service as a Korean agency of Japanese robot maker ‘TAZMO’

Model S0636

Features
  • Quad arm vacuum robot (4 E/E) for twin process modules
  • Link typed Structure
    • High heat-resistance
    • UHV Available
    • Long-life operation
  • AWC function

Model S0667

Features
  • Branching arm structure
  • Link typed Structure
    • Minimization of turning radius of double hands with maximum reach.
  • High throughput for single process module
  • Minimized foot print by 5 axes L-motion vacuum robot
  • Real time monitoring
  • AWC function

Model S0086

Features
  • Quad arm vacuum robot (4 E/E) for twin process modules
  • Link typed Structure
    • High heat-resistance
    • UHV Available
    • Long-life operation
  • AWC function

ATM Robot

Model S0093

Features
  • Three FOUPs without tracks
  • Horizontal changer mechanism for short wafer swap time
  • Mapping sensor available as an option
  • The modular design of RT unit and elevation unit - Easy maintenance
  • Prepared a new line up for 450mm wafer transfer with improved arm rigidity

Model S0715

Features
  • High precision robot by TAZMO’s robot production technology
  • Space-saving ATM robot with long time operation
  • Supply to Samsung Electronics and SK Hynix
  • Self diagnostics through real time monitoring
  • Minimum tack time by moving route optimization

Model SR8341