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PRODUCT

Products

GN-PAD

GN-PAD(Gecko pad)

  • Researches started after understanding the logics of gecko foot . (Aug-2002 )
  • UC Berkeley research team first made adhesive tapes adopting 600nm suckers. (Science Daily, Jan-2008)
  • Millions of < 200nm sucker (吸盤) enlarging surface area can create van der Waals force enough to attach on substrate surfaces, and detach easily without remaining any stain. > Control of adhesive strength

GN (Contamination, Residue, Outgassing, Sticky, Reactive) PAD

GN- PAD Shape

GN-PAD specification

Standard size Customized size
Thickness 1.0 mm 0.4 mm ~ 5.0 mm
Diameter 10 mm 3 mm ~ 42 mm(shape can be discussed)
Attachment power / pad 2.1 N/c㎡ 0.8 N/c㎡ ~6.9 N/c㎡ (90 /180° handling possible)
Recommended quantity 3 Pads on EFEM (for 300mm Wafer) Upon customer request, Vacuum Unit can be used together
Application Molded on EFEM In mold, Screw/Nut mounted, with tape.
Warranty 1 year (without artificial damage)

GN-PAD Comparison

Thickness
GN-PAD O-rings passive Edge Grip Urethan PAD VACUUM Grip PAD
Slippage X O X O X
Brocken X X O X X
Holding Marks X O X O O
Maintenance X X X X O
Replacement X O X O O
Installation X X X X O
Cleaning X O X O O
Save Cost (Strong points: for 1 year free warranty)
  • No additional budget for a man power (Maintenance, P.M, Replacement).
  • No additional budget for the utilities. (Electronics, mechanical units: vacuum pump, suppling line)
  • No down time for the P.M, replacement, maintenance
  • No additional budget for the replacement of unit. (replacement time period for 1 year)
  • Short-time cleaning (Unnecessary for the G-none if it’s using in clean room environment)
  • Short-time Installation & replacement

GN-PAD specification

Performance Test conditions results
Wafer & Pad Size 300mm Prime Wafer(thickness 775 um, weight 129g) Standard pad size(1mm thickness x 10mm Dia)
Adhesive Force Test (Horizontal) No Miss alignment, under horizontal moving speed @ 10,000mm/sec, @ 10,000mm/sec 2.1N/c㎡ (1 Point), 6.3 N/c㎡ (3 Points)
Adhesive Force Test (Vertical) No Miss alignment, under vertical moving speed @ 500 mm/sec 2.1N ≤
Consistency Test@ 150,000 cycles No contamination, No particle, No change of adhesion power @ (200 cycle/hr)*(24 hrs)*(365 days) 100% samples passed at actual moving environment.
Anti-contamination test No Outgassing, No Chemical reaction, No Friction. Cleaning SOP when particle incoming. Easy to clean with IPA, N2 Blower, DI Water
Excellent chemical resistance in IPA, Acetone >36hr test.
High Temp. Test No change of property @ ~250˚C, Clean room (class < 1000) No change of property @ upto 280°C, >5hr

GN-PAD adhesion consistency test

GN-PAD Alignment test

GN- PAD actual applied product